Scanning Electron Microscopy (SEM)

UCEM has four Scanning Electron Microscopes:

Carl Zeiss Merlin FESEM

Field Emission Scanning Electron Microscope (FE-SEM) from Carl Zeiss

• More details

  • Location

  Level 5 KBC - C Building - Map to KBC can be found here

  • Technical Specification

  - Accelerating voltage: 20 V - 30 kV
  - Electron emitter: Thermal field emission
  - Resolution (optimal WD): 1.4 nm @ 1 kV; 0.6 nm @ 30 kV (STEM mode)
  - Detector: In-lens SE, ET-SE, BSD, EsB, STEM, CCD, EDS
  - Stage configuration: 5-axes eucentric motorized
  - System control: SmartSEM GUISystem mode: High-vacuum @ RT or cryogenic temperature

Carl Zeiss Evo SEM

Scanning Electron Microscope (SEM) from Carl Zeiss

• More details

  • Location

  Level 5 KBC - C Building - Map to KBC can be found here

  • Technical Specification

  - Accelerating voltage: 200 V - 30 k
  - Electron emitter: LaB6 crystalResolution (optimal WD): 9 nm @ 1 kV; 2 nm @ 30 kV
  - Detector: ET-SE, VPSE-G4, HDBSD, CCD, EDS, WDS, EBSD
  - Stage configuration: 5-axes motorized
  - System control: SmartSEM GUISystem mode: High-vacuum or variable/extended pressure (10-3000 Pa), RT or high-temperature (<1500 degree Celcius)

FEI Scios Dual Beam Microscope (FIB-SEM)

The Thermo Scientific™ Scios™ DualBeam™

• More details

  • Location

  UCEM facility in KBC building - Map to UCEM can be found at this link

  • Technical Specification

  - Accelerating voltage: 200 V - 30 kV (EB); 500 V - 30 kV (IB)
  - Electron emitter: Thermal field emission
  - Ion emitter: Ga LMIS
  - Detector: Trinity T1/T2, ET-SE, ICE, DBS, CCD, Nav-Cam
  - Stage configuration: 5-axes eucentric motorized
  - System control: xT GUI with additional options (GIS, ASV, AutoFIB, AutoTEM)
  - System mode: High-vacuum @ RT
  - Electron Optics with 1.4 nm resolution at 1 kV and 1 pA – 400 nA beam current range
  - Ion Optics with 3.0nm resolution at 30 kV and 1.5 pA – 65 nA beam current range
  - ELPHY Plus electron beam lithography system (20 MHz pattering frequency, 1 ns dwell time increment)

   

TFS Aquilos 2 Dual Beam Microscope (Cryo-FIB SEM)

The Thermo Scientific™ Aquilos 2 Cryo-FIB

• More details

  • Location
    • The UCEM facility in the KBC building, you can find it on this link. 
      
      
  • Complete Technical Specification:
    • Accelerating voltage: 200 V - 30 kV (EB); 500 V - 30 kV (IB)
    • Electron emitter: Thermal field emission
    • Ion emitter: Ga LMIS
    • Resolution Electron Optics: 1.6 nm at 30 kV, 2.6 nm at 2 kV (at room temperature), 6.0 nm* at 2kV (at cryo-temperature)
    • Resolution Ion Optics 7.0 nm* at 30 kV
    • Detector: Trinity T1/T2, ET-SE, CCD, Nav-Cam
    • Stage configuration: 5-axes eucentric motorized
    • System control: xT GUI with additional options (GIS, Micromanipulator for TEM lamellas, Plasma coater, ASV, AutoFIB, AutoTEM)
    • System mode: High-vacuum @ RT or cryogenic temperature